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  1. 1
    Book
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    Microsensors, MEMS, and smart devices /
  2. 2
    Published 1992
    Ejournal
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    IEEE Electronic Library (IEL): 01/01/1992 to Present
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    Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems.
  3. 3
    by Jalili, Nader
    Published 2010
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    Piezoelectric-based vibration-control : from macro to micro/nano scale systems /
  4. 4
    Published 2010
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    Microrobotics for micromanipulation /
  5. 5
    Published 2006
    Ebook
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    Springer eBooks
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    BioMEMS /
  6. 6
    Published 2007
    Ebook
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    Springer eBooks
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    CMOS hotplate chemical microsensors /
  7. 7
    by Lobontiu, Nicolae
    Published 2007
    Ebook
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    Springer eBooks
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    Dynamics of microelectromechanical systems /
  8. 8
    by Bechtold, T.
    Published 2007
    Ebook
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    Springer eBooks
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    Fast simulation of electro-thermal MEMS : efficient dynamic compact models /
  9. 9
    by Lobontiu, Nicolae
    Published 2005
    Ebook
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    Springer eBooks
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    Mechanics of microelectromechanical systems /
  10. 10
    Published 2007
    Ebook
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    Springer eBooks
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    Microfluidic technologies for miniaturized analysis systems /
  11. 11
    Published 2009
    Ebook
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    Springer eBooks
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    Multi-wafer rotating MEMS machines : turbines, generators, and engines /
  12. 12
    by Kaltenbacher, Manfred, 1968-
    Published 2007
    Ebook
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    Springer eBooks
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    Numerical simulation of mechatronic sensors and actuators /
  13. 13
    by Solgaard, Olav
    Published 2009
    Ebook
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    Springer eBooks
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    Photonic microsystems : micro and nanotechnology applied to optical devices and systems /
  14. 14
    by Jalili, Nader
    Published 2010
    Ebook
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    Springer eBooks
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    Piezoelectric-based vibration-control : from macro to micro/nano scale systems /
  15. 15
    Published 2008
    Ebook
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    Springer eBooks
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    Smart devices and machines for advanced manufacturing /
  16. 16
    Ebook
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    Springer eBooks
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    Introductory MEMS : fabrication and applications /
  17. 17
    Published 2008
    Ebook
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    Springer eBooks
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    IUTAM Symposium on Flow Control and MEMS : proceedings of the IUTAM Symposium held at the Royal Geographical Society, 19-22 September 2006, hosted by Imperial College, London, England /
  18. 18
    by Vittoz, Eric A., 1938-
    Published 2010
    Ebook
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    Springer eBooks
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    Low-power crystal and MEMS oscillators : the experience of watch developments /
  19. 19
    Ebook
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    Springer eBooks
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    Radioisotope thin-film powered microsystems /
  20. 20
    by Liu, Johan
    Published 2011
    Book
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    Reliability of microtechnology : interconnects, devices, and systems /
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