Conference
Design and characterization of MEMS thermal actuator
| Title: | Design and characterization of MEMS thermal actuator |
|---|---|
| Authors: | Suma, N, Veda Sandeep Nagaraja, Pinjare, S.L., Neethu, K.N, Sudharshan, K.M. |
| Source: | 2012 International Conference on Devices, Circuits and Systems (ICDCS) Devices, Circuits and Systems (ICDCS), 2012 International Conference on. :638-642 Mar, 2012 |
| Relation: | 2012 International Conference on Devices, Circuits and Systems (ICDCS) |
| DOI: | 10.1109/ICDCSyst.2012.6188649 |
| Database: | IEEE Xplore Digital Library |