Conference
Chemical mechanical polishing: the impact of a new technology on an industry
| Title: | Chemical mechanical polishing: the impact of a new technology on an industry |
|---|---|
| Authors: | Perry, K.A. |
| Source: | 1998 Symposium on VLSI Technology Digest of Technical Papers (Cat. No.98CH36216) VLSI technology VLSI Technology, 1998. Digest of Technical Papers. 1998 Symposium on. :2-5 1998 |
| Relation: | 1998 Symposium on VLSI Technology Digest of Technical Papers |
| DOI: | 10.1109/VLSIT.1998.689177 |
| Database: | IEEE Xplore Digital Library |