Analyse harmonique sur les groupes de Lie II : séminaire Nancy-Strasbourg, 1976-78 / edité par P. Eymard [and others].
"MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dyna...
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| Main Author: | |
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| Format: | Ebook |
| Language: | French English |
| Published: |
Berlin ; New York :
Springer-Verlag,
1979.
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| Series: | Lecture notes in mathematics (Springer-Verlag) ;
739. |
| Subjects: | |
| Online Access: | Springer eBooks |
| Summary: | "MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material."--Publisher's website. |
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| Physical Description: | 1 online resource (vi, 646 pages). |
| Bibliography: | Includes bibliographical references. |
| ISBN: | 0387095357 9780387095356 0387095365 9780387095363 1281953768 9781281953766 |
| ISSN: | 0075-8434 ; |