Emission scenario document (ESD) on chemicals vapour deposition in the semiconductor industry / Joint Meeting of the Chemicals Committee and the Working Party on Chemicals, Pesticides, and Biotechnology.
This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental releases...
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| Format: | Ebook |
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| Language: | English |
| Published: |
Paris, France :
Organisation for Economic Co-operation and Development, Environment Directorate,
[2015]
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| Series: | OECD environmental health and safety publications. Series on emission scenario documents ;
no. 35. |
| Subjects: | |
| Online Access: | OECD |
| Summary: | This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental releases and occupational exposures, and discusses the typical engineering controls used to mitigate exposure to CVD precursors. |
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| Item Description: | "03-Apr-2015.". "ENV/JM/MONO(2015)5.". |
| Physical Description: | 1 online resource (80 pages) : illustrations. |
| Bibliography: | Includes bibliographical references. |
| ISBN: | 9264502432 9789264502437 |
| ISSN: | 2311-4606 ; |
| DOI: | 10.1787/b0957a80-en |