Introduction to spectroscopic ellipsometry of thin film materials : instrumentation, data analysis and applications / Xinmao Yin, Andrew Thye Shen Wee, Chi Sin Tang.
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| Main Authors: | , , |
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| Format: | Ebook |
| Language: | English |
| Published: |
Weinheim :
Wiley-VCH,
[2022]
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| Subjects: | |
| Online Access: | Click here to view this book |
| Physical Description: | 1 online resource (x, 187 pages) : illustrations |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 3527833943 9783527833948 |